Patents/Inventors

Zeqing Shen

San Jose, CAUS12 patents

13 Patents

US126107912026
Method of Forming Carbon-based Spacer for EUV Photoresist Patterns
Applied Materials, Inc.
0 cites
US124380502025
Electronic Device Fabrication Using Area-selective Deposition
Applied Materials, Inc.
0 cites
US120273742024
Processes to Deposit Amorphous-silicon Etch Protection Liner
APPLIED MATERIALS, Inc.
0 cites
US119903692024
Selective Patterning with Molecular Layer Deposition
Applied Materials, Inc.
0 cites
US119729402024
Area Selective Carbon-based Film Deposition
Applied Materials, Inc.
0 cites
US118307292023
Low-k Boron Carbonitride Films
Applied Materials, Inc.
0 cites
US117567852023
Molecular Layer Deposition Contact Landing Protection for 3D NAND
Applied Materials, Inc.
0 cites
US117323522023
Hydrogen Free Silicon Dioxide
APPLIED MATERIALS, Inc.
0 cites
US116825542023
Catalytic Thermal Deposition of Carbon-containing Materials
Applied Materials, Inc.
0 cites
US116555372023
HDP Sacrificial Carbon Gapfill
Applied Materials, Inc.
0 cites
US116580262023
Conformal Silicon Oxide Film Deposition
Applied Materials, Inc.
0 cites
US116262782023
Catalytic Formation of Boron and Carbon Films
Applied Materials, Inc.
0 cites
US115453542023
Molecular Layer Deposition Method and System
National University Of Singapore
0 cites