Patents/Inventors

Zecheng Liu

KanagawaJP9 patents

10 Patents

US123946262025
Method of Forming a Structure and System for Same
ASM IP Holding B.V.
0 cites
US123593122025
Method and System for Forming a Silicon Oxycarbide Layer and Structure Formed Using Same
ASM IP Holding B.V.
0 cites
US122725932025
Cyclical Deposition Method and Apparatus for Filling a Recess Formed Within a Substrate Surface
ASM IP Holding B.V.
0 cites
US121762432024
Method and Apparatus for Filling a Recess Formed Within a Substrate Surface
ASM IP Holding B.V.
0 cites
US121070052024
Deposition Method and an Apparatus for Depositing a Silicon-containing Material
ASM IP Holding B.V.
0 cites
US120947692024
Methods for Filling a Gap and Related Systems and Devices
ASM IP Holding B.V.
0 cites
US120273652024
Methods for Filling a Gap and Related Systems and Devices
ASM IP Holding B.V.
0 cites
US117988342023
Cyclical Deposition Method and Apparatus for Filling a Recess Formed Within a Substrate Surface
ASM IP Holding B.V.
0 cites
US117354222023
Method of Forming a Photoresist Underlayer and Structure Including Same
ASM IP Holding B.V.
0 cites
US116159802023
Method and Apparatus for Filling a Recess Formed Within a Substrate Surface
ASM IP Holding B.V.
0 cites