3 Patents
- US123745802025Method for Manufacturing Shallow Trench Isolation
Shanghai Huali Integrated Circuit Corporation
0 cites - US119729632024Wafer Transfer Module and Method Thereof for Transferring To-be-transferred Wafer
Shanghai Huali Integrated Circuit Corporation
0 cites - US119118092024Preventive Maintenance Method for Chamber of Metal Etching Machine
Shanghai Huali Microelectronics Corporation
0 cites