Patents/Inventors

Yuzuru Sakai

KurokawagunJP11 patents

4 Patents

US126032482026
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124630252025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US118173212023
Plasma Processing Apparatus and Plasma Processing Method
Tokyo Electron Limited
0 cites
US117567692023
Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites