Patents/Inventors

Yuya Minoura

MiyagiJP6 patents

7 Patents

US125639872026
Plasma Processing Method and Plasma Processing System
TOKYO ELECTRON LIMITED
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US125639882026
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123157092025
Method of Performing Maintenance on Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US120805212024
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US119202422024
Temperature Control Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US117495082023
Plasma Processing Method
TOKYO ELECTRON LIMITED
0 cites
US116886092023
Etching Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites