Patents/Inventors

Yuya Matsubara

Yokkaichi MieJP5 patents

5 Patents

US124068422025
Substrate Processing Apparatus and Method of Producing Semiconductor Device
KIOXIA CORPORATION
0 cites
US119357502024
Method for Producing Semiconductor Device
KIOXIA CORPORATION
0 cites
US118592862024
Semiconductor Manufacturing Apparatus and Manufacturing Method of Semiconductor Device
Kioxia Corporation
0 cites
US118238722023
Electrostatic Chuck Apparatus and Semiconductor Manufacturing Apparatus
KIOXIA CORPORATION
0 cites
US117666352023
Gas Recovering Apparatus, Semiconductor Manufacturing System, and Gas Recovering Method
Kioxia Corporation
0 cites