Patents/Inventors

Yuya Akanishi

KyotoJP3 patents

3 Patents

US125575812026
Etching Method and Etching Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US124446122025
Substrate Processing Method and Substrate Processing Apparatus
SCREEN Holdings Co., Ltd.
0 cites
US118814032024
Substrate Processing Method and Substrate Processing Apparatus
SCREEN HOLDINGS CO., Ltd.
0 cites