Patents/Inventors

Yuval Lubashevsky

HaifaIL6 patents

7 Patents

US125046972025
Single Grab Pupil Landscape via Broadband Illumination
KLA Corporation
0 cites
US124871902025
System and Method for Isolation of Specific Fourier Pupil Frequency in Overlay Metrology
KLA Corporation
0 cites
US124223632025
Scanning Scatterometry Overlay Metrology
KLA Corporation
0 cites
US123739362025
System and Method for Overlay Metrology Using a Phase Mask
KLA Corporation
0 cites
US121054142024
Targets for Diffraction-based Overlay Error Metrology
KLA Corporation
0 cites
US121054312024
Annular Apodizer for Small Target Overlay Measurement
KLA Corporation
0 cites
US117969252023
Scanning Overlay Metrology Using Overlay Targets Having Multiple Spatial Frequencies
KLA Corporation
0 cites