9 Patents
- 0 cites
- 0 cites
- 0 cites
- US121219962024Micro-oscillator, Method of Manufacturing Micro-oscillator, and Apparatus for Processing Micro-oscillator
MIRISE Technologies Corporation
0 cites - US121049042024Support Structure for Micro-vibrator and Method of Manufacturing Inertial Sensor
TOYOTA JIDOSHA KABUSHIKI KAISHA
0 cites - 0 cites
- 0 cites
- 0 cites
- 0 cites