Patents/Inventors

Yutaka Unno

Handa-CityJP9 patents

9 Patents

US125735982026
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US124529632025
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US123984652025
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US121701902024
Wafer Support Table and RF Rod
NGK INSULATORS, Ltd.
0 cites
US119568632024
Multi-zone Heater
NGK INSULATORS, Ltd.
0 cites
US116885902023
Electrostatic-chuck Heater
NGK INSULATORS, Ltd.
0 cites
US116642032023
Electrostatic-chuck Heater
NGK INSULATORS, Ltd.
0 cites
US116020122023
Wafer Placement Table and Method for Manufacturing the Same
NGK Insulators, Ltd.
0 cites
US115748222023
Wafer Support Table with Ceramic Substrate Including Core and Surface Layer
NGK Insulators, Ltd.
0 cites