Yutaka Shiraishi

3 Patents

• US122073822025

  Target Supply System, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method

  Gigaphoton Inc.

  0 cites
• US121854492024

  EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method

  Gigaphoton Inc.

  0 cites
• US121502332024

  Target Substance Replenishment Device, Extreme Ultraviolet Light Generation Apparatus, and Electronic Device Manufacturing Method

  Gigaphoton Inc.

  0 cites