Patents/Inventors

Yutaka Motoyama

YamanashiJP5 patents

6 Patents

US121911402025
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121319472024
Method for Manufacturing Semiconductor Device and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US120273842024
Heat Treatment Apparatus and Dummy Substrate Processing Method
Tokyo Electron Limited
0 cites
US118517522023
Method for Forming Silicon Film and Processing Apparatus
Tokyo Electron Limited
0 cites
US118079382023
Exhaust Device, Processing System, and Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115877872023
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites