Patents/Inventors

Yutaka Kouzuma

TokyoJP5 patents

6 Patents

US124498252025
Gas Supply Control Device
Hitachi High-tech Corporation
0 cites
US124424552025
Gas Supply Apparatus, Vacuum Processing Apparatus, and Gas Supply Method
Hitachi High-tech Corporation
0 cites
US122241582025
Plasma Processing Apparatus
HITACHI HIGH-TECH CORPORATION
0 cites
US119159512024
Plasma Processing Method
HITACHI HIGH-TECH CORPORATION
0 cites
US118354652023
Detecting Method and Detecting Device of Gas Components and Processing Apparatus Using Detecting Device of Gas Components
HITACHI HIGH-TECH CORPORATION
0 cites
US115574632023
Vacuum Processing Apparatus
Hitachi High-tech Corporation
0 cites