Patents/Inventors

Yutaka Fujino

NirasakiJP3 patents

4 Patents

US121295442024
Cleaning Method and Plasma Treatment Device
TOKYO ELECTRON LIMITED
0 cites
US121129212024
Plasma Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US120778652024
Film Forming Method and Film Forming Apparatus
Tokyo Electron Limited
0 cites
US120606412024
Film Forming Method and Film Forming Apparatus
TOKYO ELECTRON LIMITED
0 cites