Yutai Matsuhashi

3 Patents

• US125367762026

  Teaching Method and Transfer System for Substrate Using Three-dimensional Image Data

  TOKYO ELECTRON LIMITED

  0 cites
• US123676022025

  Information Processing Apparatus for Teaching Transfer Position of Substrate, Transfer Position Teaching Method, and Substrate Processing Apparatus Including the Information Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US122305232025

  Substrate Processing Apparatus and Image Capturing Method

  TOKYO ELECTRON LIMITED

  0 cites