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Inventors
Yusuke Aoki
Miyagi
JP
8 patents
8 Patents
US12482640
2025
Cleaning Method, Substrate Processing Method and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US12431659
2025
Connector with Simultaneously Operable Caps
YAZAKI CORPORATION
0 cites
US12418133
2025
Connector
YAZAKI CORPORATION
0 cites
US11923229
2024
Plasma Processing Method and Plasma Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US11799053
2023
Method of Manufacturing Light-emitting Device
NICHIA CORPORATION
0 cites
US11664263
2023
Substrate Processing Method and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US11641004
2023
Light Emitting Device
NICHIA CORPORATION
0 cites
US11594398
2023
Apparatus and Method for Plasma Processing
TOKYO ELECTRON LIMITED
0 cites