Patents/Inventors

Yuri Paskover

Milpitas, CAUS8 patents

9 Patents

US124871902025
System and Method for Isolation of Specific Fourier Pupil Frequency in Overlay Metrology
KLA Corporation
0 cites
US124223632025
Scanning Scatterometry Overlay Metrology
KLA Corporation
0 cites
US122221992025
Systems and Methods for Measurement of Misregistration and Amelioration Thereof
KLA Corporation
0 cites
US120011482024
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites
US118745392024
Perception Camera with Road Surface Glare Reduction
GM Global Technology Operations LLC
0 cites
US118525902023
Systems and Methods for Metrology with Layer-specific Illumination Spectra
KLA Corporation
0 cites
US118416212023
Moiré Scatterometry Overlay
KLA Corporation CA
0 cites
US118153472023
Optical Near-field Metrology
Kla-tencor Corporation
0 cites
US115927552023
Enhancing Performance of Overlay Metrology
KLA Corporation
0 cites