Yuri Kimura

3 Patents

• US125610502026

  Information Processing Apparatus Implementing a Piping and Instrumentation Diagram, Information Processing Method, and Program

  YOKOGAWA ELECTRIC CORPORATION

  0 cites
• US125418372026

  Etching Processing System, Method of Predicting Etching Quality, and Non-transitory Storage Medium of Etching Quality Prediction Storing a Program Causing a Computer to Implement a Prediction

  Tokyo Electron Limited

  0 cites
• US122886782025

  Substrate Processing Apparatus and Substrate Transfer Position Adjustment Method

  TOKYO ELECTRON LIMITED

  0 cites