3 Patents
- US116686252023Apparatus and Method for Detecting Wavefront Aberration of Objective Lens
Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences
0 cites - US116044182023Multi-channel Device and Method for Measuring Distortion and Magnification of Objective Lens
Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences
0 cites - US115610822023Method for Compensation During the Process of Wavefront Reconstruction in Grating-based Lateral Shearing Interferometry
Shanghai Institute Of Optics And Fine Mechanics, Chinese Academy Of Sciences
0 cites