Yung-cheng Chen

5 Patents

• US124297832025

  EUV Lithography Apparatus and Operating Method for Mitigating Contamination

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

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• US122769062025

  Methods for Cleaning Lithography Mask

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.

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• US121893062025

  Method and System of Surface Topography Measurement for Lithography

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites
• US119407372024

  Method of Fabricating Reticle

  TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.

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• US118358662023

  Method and System of Surface Topography Measurement for Lithography

  TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY Ltd.

  0 cites