Patents/Inventors

Yuma Iwata

IchinomiyaJP2 patents

3 Patents

US122437642025
Electrostatic Chuck
NGK INSULATORS, Ltd.
0 cites
US121502152024
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites
US121084982024
Wafer Placement Table
NGK INSULATORS, Ltd.
0 cites