Yukitomo Hirochi

5 Patents

• US122550692025

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites
• US119674902024

  Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US117495102023

  Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US115519142023

  Plasma Generating Device, Substrate Processing Apparatus, and Method of Manufacturing Semiconductor Device

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US115535652023

  Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Non-transitory Computer-readable Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites