Yukio Ohizumi

3 Patents

• US126010442026

  Gate Valve, Substrate Processing Apparatus, and Substrate Processing Method

  TOKYO ELECTRON LIMITED

  0 cites
• US116742252023

  Substrate Processing Apparatus

  TOKYO ELECTRON LIMTED

  0 cites
• US115726252023

  Rotation Detection Jig, Substrate Processing Apparatus and Method of Operating the Substrate Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites