Patents/Inventors

Yukinori Sakiyama

West Linn, ORUS4 patents

4 Patents

US125818752026
Processing Tool Capable for Forming Carbon Layers on Substrates
LAM RESEARCH CORPORATION
0 cites
US123409922025
Detection and Location of Anomalous Plasma Events in Fabrication Chambers
Lam Research Corporation
0 cites
US123225822025
Anomalous Plasma Event Detection and Mitigation in Semiconductor Processing
Lam Research Corporation
0 cites
US118239282023
Control of Wafer Bow in Multiple Stations
Lam Research Corporation
0 cites