Yukinao Kaga

4 Patents

• US125037672025

  Non-transitory Computer-readable Recording Medium, Substrate Processing Apparatus and Substrate Processing Method

  Kokusai Electric Corporation

  0 cites
• US120000452024

  Method of Manufacturing Semiconductor Device, Non-transitory Computer-readable Recording Medium, Substrate Processing Apparatus and Substrate Processing Method

  Kokusai Electric Corporation

  0 cites
• US118760102024

  Substrate Processing Apparatus and Recording Medium

  KOKUSAI ELECTRIC CORPORATION

  0 cites
• US118548502023

  Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, Method of Loading Substrate and Non-transitory Computer-readable Recording Medium

  Kokusai Electric Corporation

  0 cites