Patents/Inventors

Yukihiro Mori

MachidaJP9 patents

9 Patents

US124313342025
Gas Distribution Assembly
ASM IP Holding B.V.
0 cites
US121295462024
Methods and Apparatuses for Flowable Gap-fill
ASM IP Holding B.V.
0 cites
US121257222024
Multi-stage Substrate Processing System
ASM IP Holding B.V.
0 cites
US121069442024
Rotating Substrate Support
ASM IP Holding B.V.
0 cites
US120247722024
Apparatuses for Thin Film Deposition
ASM IP Holding B.V.
0 cites
US120026612024
Susceptor Having Cooling Device
ASM IP Holding B.V.
0 cites
US119868682024
System Dedicated for Parts Cleaning
ASM IP Holding B.V.
0 cites
US117610842023
Substrate Processing Apparatus and Method of Processing Substrate
ASM IP Holding B.V.
0 cites
US116005032023
High-throughput, Multi-chamber Substrate Processing System
ASM IP HOLDING B.V.
0 cites