Patents/Inventors

Yuki Osada

YamanashiJP3 patents

4 Patents

US124826372025
Plasma Source and Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US124630132025
Plasma Processing Apparatus
Tokyo Electron Limited
0 cites
US120682082024
Plasma Processing Apparatus and Control Method
TOKYO ELECTRON LIMITED
0 cites
US115695582023
Directional Coupler for Use in a Substrate Processing Apparatus, Where the Directional Coupler Includes a Coaxial Line Coupled to a Conductor on a Substrate
TOKYO ELECTRON LIMITED
0 cites