4 Patents
- 0 cites
- US122527752025Sputtering Target, Method for Manufacturing Sputtering Target, and Method for Forming Thin Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites - US119591652024Semiconductor Device Comprising Oxide Semiconductor Film
Semiconductor Energy Laboratory Co., Ltd.
0 cites - US115455792023Semiconductor Device and Method for Manufacturing the Same
Semiconductor Energy Laboratory Co., Ltd.
0 cites