Patents/Inventors

Yukako Anryu

OsakaJP5 patents

6 Patents

US118207352023
Salt, Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US117390562023
Carboxylate, Carboxylic Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US117405552023
Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US116812202023
Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US115560562023
Salt, Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites
US115502182023
Salt, Acid Generator, Resist Composition and Method for Producing Resist Pattern
SUMITOMO CHEMICAL COMPANY, LIMITED
0 cites