Patents/Inventors

Yuji Seshimo

YamanashiJP5 patents

4 Patents

US125955592026
Substrate Processing Method and Substrate Processing Apparatus
TOKYO ELECTRON LIMITED
0 cites
US123717842025
Gas Management Method and Substrate Processing System
TOKYO ELECTRON LIMITED
0 cites
US122058172025
Method for Depositing Film and Film Deposition System
Tokyo Electron Limited
0 cites
US119055952024
Film Deposition Apparatus and Film Deposition Method
Tokyo Electron Limited
0 cites