Patents/Inventors

Yuji Obata

YamanashiJP4 patents

4 Patents

US125291392026
Shower Plate and Film Deposition Apparatus
Tokyo Electron Limited
0 cites
US123659852025
Deposition Apparatus with Pressure Sensor and Shower Head on Same Plane and Deposition Method
Tokyo Electron Limited
0 cites
US120247762024
Gas Supply Apparatus, Gas Supply Method, and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US119878852024
Gas Supply Apparatus, Gas Supply Method, and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites