Patents/Inventors

Yuji Akatsuka

HandaJP4 patents

5 Patents

US121911832025
Wafer Placement Table and Method of Manufacturing the Same
NGK INSULATORS, Ltd.
0 cites
US120273852024
Ceramic Heater
NGK INSULATORS, Ltd.
0 cites
US120092452024
Member for Semiconductor Manufacturing Apparatus and Method for Manufacturing the Same
NGK INSULATORS, Ltd.
0 cites
US118374902023
Electrostatic Chuck Heater
NGL INSULATORS, Ltd.
0 cites
US117156522023
Member for Semiconductor Manufacturing Apparatus
NGK INSULATORS, Ltd.
0 cites