Patents/Inventors

Yuichiro Wagatsuma

NirasakiJP3 patents

4 Patents

US124826952025
Substrate Treatment Method and Substrate Treatment Device
TOKYO ELECTRON LIMITED
0 cites
US123476762025
Substrate Processing Method and Substrate Processing System
Tokyo Electron Limited
0 cites
US119159642024
Substrate Processing Apparatus and Stage
TOKYO ELECTRON LIMITED
0 cites
US116642662023
Substrate Processing Apparatus and Substrate Delivery Method
TOKYO ELECTRON LIMITED
0 cites