Patents/Inventors

Yuichiro Miki

KanagawaJP1 patent

2 Patents

US121471642024
Motion Control Apparatus, Lithography Apparatus, Planarization Apparatus, Processing Apparatus, and Article Manufacturing Method
CANON KABUSHIKI KAISHA
0 cites
US118158612023
Feedback Control Device That Suppresses Disturbance Vibration Using Machine Learning, Article Manufacturing Method, and Feedback Control Method
CANON KABUSHIKI KAISHA
0 cites