Yuichiro Kunugimoto

6 Patents

• US122449722025

  Substrate Processing Monitoring Apparatus Based on Imaging Video Data, Substrate Processing Apparatus, Substrate Processing Monitoring Method, and Storage Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US121745492024

  Liquid Amount Measuring Method and Computer-readable Recording Medium

  TOKYO ELECTRON LIMITED

  0 cites
• US120573272024

  Substrate Processing Apparatus and Substrate Processing Method

  TOKYO ELECTRON LIMITED

  0 cites
• US119142982024

  Liquid Processing Apparatus and Method of Detecting Liquid in Liquid Processing Apparatus

  TOKYO ELECTRON LIMITED

  0 cites
• US117264092023

  Substrate Processing System, Liquid Amount Measuring Method, Computer-readable Recording Medium, and Measuring Jig

  TOKYO ELECTRON LIMITED

  0 cites
• US116370312023

  Systems and Methods for Spin Process Video Analysis During Substrate Processing

  Tokyo Electron Limited

  0 cites