Patents/Inventors

Yuichi Wada

ChibaJP11 patents

12 Patents

US124760862025
Spray-coated Electrostatic Chuck Design
Applied Materials, Inc.
0 cites
US121486292024
Shutter Disk
Applied Materials, Inc.
0 cites
US121005772024
High Conductance Inner Shield for Process Chamber
APPLIED MATERIALS, Inc.
0 cites
US120805222024
Preclean Chamber Upper Shield with Showerhead
APPLIED MATERIALS, Inc.
0 cites
US119131072024
Methods and Apparatus for Processing a Substrate
APPLIED MATERIALS, Inc.
0 cites
US118813852024
Methods and Apparatus for Reducing Defects in Preclean Chambers
APPLIED MATERIALS, Inc.
0 cites
US118624802024
Shutter Disk
Applied Materials, Inc.
0 cites
US116294092023
Inline Microwave Batch Degas Chamber
APPLIED MATERIALS, Inc.
0 cites
US116108072023
Methods and Apparatus for Cleaving of Semiconductor Substrates
APPLIED MATERIALS, Inc.
0 cites
US115877992023
Methods and Apparatus for Processing a Substrate
APPLIED MATERIALS, Inc.
0 cites
US115691222023
Methods and Apparatus for Cleaving of Semiconductor Substrates
APPLIED MATERIALS, Inc.
0 cites
US115574992023
Methods and Apparatus for Prevention of Component Cracking Using Stress Relief Layer
APPLIED MATERIALS, Inc.
0 cites