12 Patents
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- US124313732025Temperature Correction Information Calculating Device, Semiconductor Manufacturing Apparatus, Recording Medium, and Temperature Correction Information Calculating Method
Tokyo Electron Limited
0 cites - US124313962025Temperature Correction Information Calculation Device, Semiconductor Manufacturing Apparatus, Storage Medium, and Temperature Correction Information Calculation Method
TOKYO ELECTRON LIMITED
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- US123410392025Substrate Processing Apparatus and Temperature Regulation Method
Tokyo Electron Limited
0 cites - US122538382025Information Processing Device, Recording Medium, and Process Condition Search Method
Tokyo Electron Limited
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- US118043952023Substrate Processing Apparatus, Information Processing Apparatus, and Substrate Processing Method
TOKYO ELECTRON LIMITED
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