Patents/Inventors

Yuichi Nishimura

OyamaJP5 patents

4 Patents

US125502452026
Extreme Ultraviolet Light Generation Apparatus and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US125324012026
EUV Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites
US124552312025
EUV Light Generation Apparatus, Electronic Device Manufacturing Method, and Inspection Method
GIGAPHOTON Inc.
0 cites
US117787212023
Extreme Ultraviolet Light Generation System and Electronic Device Manufacturing Method
Gigaphoton Inc.
0 cites