Patents/Inventors

Yuichi Furuya

YamanashiJP6 patents

6 Patents

US125711042026
Source Gas Supply Method, Source Gas Supply Mechanism, and Film Forming System
Tokyo Electron Limited
0 cites
US124008412025
Trap Device and Semiconductor Manufacturing Device
Tokyo Electron Limited
0 cites
US123920332025
Substrate Processing Apparatus and Substrate Processing Method
Tokyo Electron Limited
0 cites
US123449302025
Deposition Method and Deposition Apparatus
Tokyo Electron Limited
0 cites
US117964602023
Absorbance Analysis Apparatus for DCR Gas, Absorbance Analysis Method for DCR Gas, and Absorbance Analysis Program Recording Medium on Which Program for DCR Gas Is Recorded
HORIBA STEC, CO., Ltd.
0 cites
US117537202023
Film Forming Apparatus, Source Supply Apparatus, and Film Forming Method
TOKYO ELECTRON LIMITED
0 cites