Patents/Inventors

Yuhou Wang

Fremont, CAUS12 patents

13 Patents

US126092832026
Control of Pulsing Frequencies and Duty Cycles of Parameters of RF Signals
Lam Research Corporation
0 cites
US125073382025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US124903702025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US124841392025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US124712022025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US124244102025
RF Pulsing Within Pulsing for Semiconductor RF Plasma Processing
Lam Research Corporation
0 cites
US123974352025
Substrate Location Detection and Adjustment
Lam Research Corporation
0 cites
US122610292025
Protection System for Switches in Direct Drive Circuits of Substrate Processing Systems
Lam Research Corporation
0 cites
US121931382025
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites
US121658412024
Dual-frequency, Direct-drive Inductively Coupled Plasma Source
Lam Research Corporation
0 cites
US117281362023
RF Pulsing Within Pulsing for Semiconductor RF Plasma Processing
Lam Research Corporation
0 cites
US117281372023
Direct Frequency Tuning for Matchless Plasma Source in Substrate Processing Systems
Lam Research Corporation
0 cites
US117168052023
Matchless Plasma Source for Semiconductor Wafer Fabrication
Lam Research Corporation
0 cites