Patents/Inventors

Yueh Lin Yang

Hsin-ChuTW2 patents

3 Patents

US123680662025
System and Method for Correcting Non-ideal Wafer Topography
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US120274072024
Substrate Support Apparatus and Method
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118090842023
Radiation Source Supply System for Lithographic Tools
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites