Patents/Inventors

Yu-tien Shen

HsinchuTW23 patents

22 Patents

US125637772026
Complementary Field Effect Transistor with Oblique Conductive Through Substrate Layer
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US125435572026
System and Method to Reduce Layout Dimensions Using Non-perpendicular Process Scheme
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124826542025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US124761502025
Critical Dimension Uniformity (CDU) Control Method and Semiconductor Substrate Processing System
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US123604602025
System and Method for Selecting Photolithography Processes
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123548732025
System and Method for Multiple Step Directional Patterning
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123476812025
Method of Forming a Semiconductor Device
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US123343422025
Pattern Fidelity Enhancement
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US122305072025
Method of Manufacturing Semiconductor Devices Using Directional Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US121533502024
Method of Manufacturing Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US120946912024
Etch Apparatus for Compensating Shifted Overlayers
Taiwan Semiconductor Manufacturing Co., Ltd.
0 cites
US120273682024
Method for Fabricating Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119553382024
Directional Deposition for Semiconductor Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US119011882024
Method for Improved Critical Dimension Uniformity in a Semiconductor Device Fabrication Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US119011902024
Method of Patterning
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US118814012024
Method of Forming Metal Features
Taiwan Semiconductor Manufacturing Company, Ltd.
0 cites
US118624652024
Fine Line Patterning Methods
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US117969222023
Method of Manufacturing Semiconductor Devices
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117911612023
Pattern Fidelity Enhancement
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US117768102023
Method of Forming a Semiconductor Device
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites
US116519722023
Method of Manufacturing Semiconductor Devices Using Directional Process
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, Ltd.
0 cites
US115690902023
Directional Deposition for Semiconductor Fabrication
TAIWAN SEMICONDUCTOR MANUFACTURING CO., Ltd.
0 cites