Patents/Inventors

Yu Ishii

TokyoJP3 patents

3 Patents

US120366342024
Substrate Processing Control System, Substrate Processing Control Method, and Program
EBARA CORPORATION
0 cites
US117017502023
Top Ring for Holding a Substrate and Substrate Processing Apparatus
EBARA CORPORATION
0 cites
US116181232023
Polishing Method and Polishing Apparatus
EBARA CORPORATION
0 cites