Patents/Inventors

Yu-hao Tsai

Albany, NYUS19 patents

9 Patents

US126181542026
Selective Non-plasma Deposition of Mask Protection Material
Tokyo Electron Limited
0 cites
US126222342026
Selective In-situ Carbon-based Mask Protection
Tokyo Electron Limited
0 cites
US124244472025
Method to Selectively Etch Silicon Nitride to Silicon Oxide Using Water Crystallization
Tokyo Electron Limited
0 cites
US124008632025
Method for Etching for Semiconductor Fabrication
TOKYO ELECTRON LIMITED
0 cites
US123082122025
In-situ Adsorbate Formation for Plasma Etch Process
Tokyo Electron Limited
0 cites
US122875782025
Cyclic Method for Reactive Development of Photoresists
TOKYO ELECTRON LIMITED
0 cites
US122725582025
Selective and Isotropic Etch of Silicon Over Silicon-germanium Alloys and Dielectrics; via New Chemistry and Surface Modification
Tokyo Electron Limited
0 cites
US118374712023
Methods of Patterning Small Features
Tokyo Electron Limited
0 cites
US118043802023
High-throughput Dry Etching of Films Containing Silicon-oxygen Components or Silicon-nitrogen Components by Proton-mediated Catalyst Formation
Tokyo Electron Limited
0 cites