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Inventors
Younseon Wang
Suwon-si
KR
4 patents
3 Patents
US12575349
2026
Process Gas for Cryogenic Etching, Plasma Etching Apparatus, and Method of Fabricating Semiconductor Device Using the Same
Samsung Electronics Co., Ltd.
0 cites
US12547071
2026
Spin Coater
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US12444590
2025
Plasma Sensor Module
Samsung Electronics Co., Ltd.
0 cites