Patents/Inventors

Youngtai Kang

YamanashiJP7 patents

6 Patents

US125687932026
Substrate Processing Apparatus, Substrate Processing Method, and Storage Medium Thereof
TOKYO ELECTRON LIMITED
0 cites
US124282422025
Information Processing Apparatus, Transfer Position Correction Method, and Substrate Processing Apparatus
Tokyo Electron Limited
0 cites
US121658922024
Control Device, System and Control Method
TOKYO ELECTRON LIMITED
0 cites
US118043952023
Substrate Processing Apparatus, Information Processing Apparatus, and Substrate Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115748282023
Substrate Processing Apparatus, Information Processing Apparatus, and Information Processing Method
TOKYO ELECTRON LIMITED
0 cites
US115680272023
License Authentication Device and License Authentication Method
TOKYO ELECTRON LIMITED
0 cites