10 Patents
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- US125867652026Surface Modification for Metal-containing Photoresist Deposition
Lam Research Corporation
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- US124746402025Integration of Dry Development and Etch Processes for EUV Patterning in a Single Process Chamber
Lam Research Corporation
0 cites - US123410212025Selective Etch Using Deposition of a Metalloid or Metal Containing Hardmask
Lam Research Corporation
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- US119106522024Organic Light Emitting Display Panel and Organic Light Emitting Display Device Including the Same
LG Display Co., Ltd.
0 cites - US118644292024Organic Light Emitting Panel and Organic Light Emitting Display Device Including the Same
LG Display Co., Ltd.
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