Patents/Inventors

Youngduk Suh

Suwon-siKR5 patents

5 Patents

US126079442026
Extreme Ultraviolet Source Cleaning Apparatus, EUV Source Cleaning Method Using the Same, and Substrate Processing Method Including the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US125786612026
Apparatus for Cleaning an Extreme Ultraviolet Light Creation Chamber
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US123994292025
Semiconductor Fabrication Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US119406202024
Method of Cleaning Collector of EUV Light Source System
Samsung Electronics Co., Ltd.
0 cites
US116762632023
Extreme Ultraviolet (EUV) Collector Inspection Apparatus and Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites