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Inventors
Young Seok Roh
Suwon-si
KR
2 patents
3 Patents
US12409404
2025
Scrubber System and Wet Cleaning Method Using the Same
Global Standard Technology Co., Ltd
0 cites
US12290778
2025
Scrubber, ALD Process System Including the Scrubber and Method for Fabricating Semiconductor Device Using the Scrubber
CSK Inc.
0 cites
US11931683
2024
Scrubber System and Wet Cleaning Method Using the Same
Samsung Electronics Co., Ltd.
0 cites