Patents/Inventors

Young-hoo Kim

Yongin-siKR13 patents

13 Patents

US125786472026
Substrate Rotating Apparatus, Substrate Processing System Including the Same, and Substrate Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124682272025
Apparatus and Method for Processing Substrate
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US124630612025
Wafer Drying Apparatus, Wafer Processing System Including the Same, and Wafer Processing Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US123225872025
Substrate Drying Apparatus and Semiconductor Device Manufacturing Method Using Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US122117162025
Substrate Processing Apparatus and Substrate Processing Method
Samsung Electronics Co., Ltd.
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US121989232025
Substrate Processing Method and Substrate Processing System
Samsung Electronics Co., Ltd.
0 cites
US121658662024
Wafer Cleaning Apparatus and Wafer Cleaning Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US120428282024
Wafer Cleaning Apparatus and Wafer Cleaning Method Using the Same
Samsung Electronics Co., Ltd.
0 cites
US118878682024
Substrate Processing Apparatus and Apparatus for Manufacturing Integrated Circuit Device
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117422212023
Dry Cleaning Apparatus and Dry Cleaning Method
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US117215652023
Multi-chamber Apparatus
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116485942023
Wafer Cleaning Apparatus and Wafer Cleaning Method Using the Same
SAMSUNG ELECTRONICS CO., Ltd.
0 cites
US116107882023
Process Chamber and Substrate Processing Apparatus Including the Same
Samsung Electronics Co., Ltd.
0 cites